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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Design and fabrication of light driven micropump

✍ Scribed by Mizoguchi, H.; Ando, M.; Mizuno, T.; Takagi, T.; Nakajima, N.

Book ID: 126751546
Publisher: IEEE
Year: 1992
Weight: 428 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187686

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