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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - High-precision micronozzle fabrication

✍ Scribed by Kuo, C.-L.; Masuzawa, T.; Fujino, M.

Book ID: 126663000
Publisher: IEEE
Year: 1992
Weight: 627 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187701

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