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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Fabrication of high depth-to-width aspect ratio microstructures

✍ Scribed by Engelmann, G.; Ehrmann, O.; Simon, J.; Reichl, H.

Book ID: 124096487
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 652 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187697

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