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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Linear and rotational magnetic micromotors fabricated using silicon technology

✍ Scribed by Wagner, B.; Kreutzer, M.; Benecke, W.

Book ID: 120188670
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 712 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187715

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