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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - A new electrostatic actuator providing improved stroke length and force

✍ Scribed by Branebjerg, J.; Gravesen, P.

Book ID: 120163236
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 502 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187682

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