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[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Selective mode excitation and detection of micromachined resonators

✍ Scribed by Prak, A.; Elwenspoek, M.; Fluitman, J.H.J.

Book ID: 123613343
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 614 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187721

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