𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Novel polysilicon comb actuators for xy-stages

✍ Scribed by Jaecklin, V.P.; Linder, C.; de Rooij, N.F.; Moret, J.M.; Bischof, R.; Rudolf, F.

Book ID: 124155019
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 352 KB
Category: Article
ISBN-13: 9780780304970
DOI: 10.1109/MEMSYS.1992.187707

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - High-precision micronozzle fabrication

✍ Kuo, C.-L.; Masuzawa, T.; Fujino, M. 📂 Article 📅 1992 🏛 IEEE ⚖ 627 KB

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Design and fabrication of light driven micropump

✍ Mizoguchi, H.; Ando, M.; Mizuno, T.; Takagi, T.; Nakajima, N. 📂 Article 📅 1992 🏛 IEEE ⚖ 428 KB

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Selective mode excitation and detection of micromachined resonators

✍ Prak, A.; Elwenspoek, M.; Fluitman, J.H.J. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 614 KB

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - A new electrostatic actuator providing improved stroke length and force

✍ Branebjerg, J.; Gravesen, P. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 502 KB

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Linear and rotational magnetic micromotors fabricated using silicon technology

✍ Wagner, B.; Kreutzer, M.; Benecke, W. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 712 KB

[IEEE [1992] Proceedings IEEE Micro Elec

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Fabrication of high depth-to-width aspect ratio microstructures

✍ Engelmann, G.; Ehrmann, O.; Simon, J.; Reichl, H. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 652 KB