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[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - A planar air levitated electrostatic actuator system

✍ Scribed by Pister, K.S.J.; Fearing, R.S.; Howe, R.T.

Book ID: 121325106
Publisher: IEEE
Year: 1990
Weight: 507 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110250

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