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[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Micromachined silicon microvalve

✍ Scribed by Ohnstein, T.; Fukiura, T.; Ridley, J.; Bonne, U.

Book ID: 120979740
Publisher: IEEE
Year: 1990
Weight: 322 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110256

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