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[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Design and fabrication of micromechanical logic elements

✍ Scribed by Bergstrom, P.L.; Tamagawa, T.; Polla, D.L.

Book ID: 126660779
Publisher: IEEE
Year: 1990
Weight: 374 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110239

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