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[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - A microfabricated three-degree-of-freedom parallel mechanism

✍ Scribed by Behi, F.; Mehregany, M.; Gabriel, K.J.

Book ID: 121813543
Publisher: IEEE
Year: 1990
Weight: 703 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110269

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