𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Room temperature, open-loop levitation of microdevices using diamagnetic materials

✍ Scribed by Pelrine, R.E.

Book ID: 118734715
Publisher: IEEE
Year: 1990
Weight: 467 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110242

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE IEEE Micro Electro Mechanical Syst

[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Resonant-structure micromotors

✍ Pisano, A.P. 📂 Article 📅 1989 🏛 IEEE ⚖ 351 KB

[IEEE IEEE Micro Electro Mechanical Syst

[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Applications of silicon microactuators based on bimorph structures

✍ Benecke, W.; Riethmuller, W. 📂 Article 📅 1989 🏛 IEEE ⚖ 344 KB

[IEEE IEEE Micro Electro Mechanical Syst

[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Micro-assembly with a focused laser beam

✍ Rambin, C.L.; Warrington, R.O. 📂 Article 📅 1994 🏛 IEEE 🌐 English ⚖ 660 KB

[IEEE IEEE Micro Electro Mechanical Syst

[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Wet chemical etching mechanism of silicon

✍ Elwenspoek, M.; Lindberg, U.; Kok, H.; Smith, L. 📂 Article 📅 1994 🏛 IEEE ⚖ 649 KB

[IEEE IEEE Micro Electro Mechanical Syst

[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Self-consistent simulation and modelling of electrostatically deformed diaphragms

✍ Osterberg, P.; Yie, H.; Cai, X.; White, J.; Senturia, S. 📂 Article 📅 1994 🏛 IEEE ⚖ 582 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Touch mode capacitive pressure sensors for industrial applications

✍ Ko, W.H.; Qiang Wang, 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 505 KB