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[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Applications of silicon microactuators based on bimorph structures

✍ Scribed by Benecke, W.; Riethmuller, W.

Book ID: 118232031
Publisher: IEEE
Year: 1989
Weight: 344 KB
Volume: 0
Category: Article
DOI: 10.1109/memsys.1989.77974

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