𝔖 Bobbio Scriptorium

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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Self-consistent simulation and modelling of electrostatically deformed diaphragms

✍ Scribed by Osterberg, P.; Yie, H.; Cai, X.; White, J.; Senturia, S.

Book ID: 118143398
Publisher: IEEE
Year: 1994
Weight: 582 KB
Volume: 0
Category: Article
ISBN-13: 9780780318335
DOI: 10.1109/memsys.1994.555593

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