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Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Deposition from a Novel Precursor

✍ Scribed by Becker, Jill S.; Suh, Seigi; Wang, Shenglong; Gordon, Roy G.

Book ID: 126329831
Publisher: American Chemical Society
Year: 2003
Tongue: English
Weight: 179 KB
Volume: 15
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm021772s

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