Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor–Strontium-bis(tri-isopropyl cyclopentadienyl)

✍ Scribed by M. Vehkamäki; T. Hänninen; M. Ritala; M. Leskelä; T. Sajavaara; E. Rauhala; J. Keinonen

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 451 KB
• Volume: 7
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(200103)7:2<75::aid-cvde75>3.0.co;2-b