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ChemInform Abstract: Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor — Strontium-bis(tri-isopropylcyclopentadienyl).

✍ Scribed by Marko Vehkamaeki; Timo Haenninen; Mikko Ritala; Markku Leskelae; Timo Sajavaara; Eero Rauhala; Juhani Keinonen

Publisher: John Wiley and Sons
Year: 2010
Weight: 32 KB
Volume: 32
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200122006

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