Deposition of cadmium sulphide thin film
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M. Chunggaze; M. Azad Malik; P. O'Brien
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Article
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1997
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John Wiley and Sons
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English
β 157 KB
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Thin films of CdS were grown by low-pressure metalorganic chemical vapour deposition (LP-MOCVD, 10 72 Torr) on GaAs(100) and borosilicate glass using the novel single-source precursor bis(diethylmonothiocarbamato)cadmium(II). The deposition of CdS was observed at substrate temperatures of 300 8C and