High-performance MIM capacitor using ALD high-k HfO2-Al2O3 laminate dielectrics

✍ Scribed by Shi-Jin Ding; Hang Hu; Lim, H.F.; Kim, S.J.; Yu, X.F.; Chunxiang Zhu; Li, M.F.; Byung Jin Cho; Chan, D.S.H.; Rustagi, S.C.; Yu, M.B.; Chin, A.; Dim-Lee Kwong

• Book ID: 111883900
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 258 KB
• Volume: 24
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/led.2003.820664