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[IEEE IEEE International Electron Devices Meeting 2003 - Washington, DC, USA (8-10 Dec. 2003)] IEEE International Electron Devices Meeting 2003 - High performance ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for RF and mixed signal IC applications

✍ Scribed by Hang Hu, ; Shi-Jin Ding, ; Lim, H.F.; Chunxiang Zhu, ; Li, M.F.; Kim, S.J.; Yu, X.F.; Chen, J.H.; Yong, Y.F.; Byung Jin Cho, ; Chan, D.S.H.; Rustagi, S.C.; Yu, M.B.; Tung, C.H.; Anyan Du, ; Doan My, ; Foot, P.D.; Chin, A.; Dim-Lee Kwong,

Book ID: 115467485
Publisher: IEEE
Year: 2003
Weight: 253 KB
Edition: 1
Volume: 0
Category: Article
ISBN-13: 9780780378728
DOI: 10.1109/iedm.2003.1269303

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