✦ LIBER ✦
Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics
✍ Scribed by Yang, M.Y.; Huang, C.H.; Chin, A.; Chunxiang Zhu; Cho, B.J.; Li, M.F.; Dim-Lee Kwong
- Book ID
- 115470248
- Publisher
- IEEE
- Year
- 2003
- Tongue
- English
- Weight
- 285 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1531-1309
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