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Hetero- and homo-epitaxial growth of 3C-SiC for MOS-FETs

✍ Scribed by H. Nagasawa; K. Yagi; T. Kawahara; N. Hatta; M. Abe

Book ID: 108207538
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 234 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.10.046

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