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Critical Temperature Programs for Surface Carbonization of Si(111) and Their Effects on 3C-SiC Film Growth

✍ Scribed by Nguyen, Nam Giang; Liu, Chie-Sheng; Hu, Ming-Shien; Hong, Lu-Sheng

Book ID: 126853027
Publisher: Institute of Pure and Applied Physics
Year: 2013
Tongue: English
Weight: 852 KB
Volume: 52
Category: Article
ISSN: 0021-4922
DOI: 10.7567/jjap.52.085502

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