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Effects of carbonization and substrate temperature on the growth of 3C–SiC on Si(1 1 1) by SSMBE

✍ Scribed by Zhongliang Liu; Jinfeng Liu; Peng Ren; Yuyu Wu; Pengshou Xu

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 438 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.10.085

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