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Interpretation of initial stage of 3C-SiC growth on Si(1 0 0) using dimethylsilane

✍ Scribed by Yuzuru Narita; Masayuki Harashima; Kanji Yasui; Tadashi Akahane; Masasuke Takata

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
362 KB
Volume
252
Category
Article
ISSN
0169-4332

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