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Kinetics of epitaxial growth of Si and SiGe films on (1 1 0) Si substrates

✍ Scribed by N. Sugiyama; Y. Moriyama; S. Nakaharai; T. Tezuka; T. Mizuno; S. Takagi

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
233 KB
Volume
224
Category
Article
ISSN
0169-4332

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