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Surface carbonization of Si(1 0 0) by C2H2 and its effects on the subsequent SiC(1 0 0) epitaxial film growth

✍ Scribed by Chie Sheng Liu; Lu Sheng Hong; Ming Shien Hu

Book ID: 108191402
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 329 KB
Volume: 69
Category: Article
ISSN: 0022-3697
DOI: 10.1016/j.jpcs.2007.07.041

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