Effect of the miscut direction in (111) 3C-SiC film growth on off-axis (111)Si

✍ Scribed by Severino, A.; Camarda, M.; Condorelli, G.; Perdicaro, L. M. S.; Anzalone, R.; Mauceri, M.; La Magna, A.; La Via, F.

• Book ID: 121382179
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 378 KB
• Volume: 94
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3085769