✦ LIBER ✦
In situ temperature measurement by infrared absorption for low-temperature epitaxial growth of homo- and hetero-epitaxial layers on silicon
✍ Scribed by J. C. Sturm; P. V. Schwartz; P. M. Garone
- Book ID
- 112812166
- Publisher
- Springer US
- Year
- 1990
- Tongue
- English
- Weight
- 342 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0361-5235
No coin nor oath required. For personal study only.