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Gettering in silicon-on-insulator wafers with polysilicon layer

✍ Scribed by H. Savin; M. Yli-Koski; A. Haarahiltunen; V. Virkkala; H. Talvitie; M.I. Asghar; J. Sinkkonen; J. Hintsala

Book ID
108215625
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
382 KB
Volume
159-160
Category
Article
ISSN
0921-5107

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D e p o s i t i o n o f T h i c k P o l y s i l i c o n L a y e r s on Y t r e s s -r e d u c e d S i l i c o n Wafers I n t r o d u c t i o n The d e p o s i t i o n o f t h i c k p o l y s i l i c o n l a y e r s on o x i d i z e d s i l i c o n s