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Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

✍ Scribed by A. Wellner; P.R. Preece; J.C. Fowler; R.E. Palmer


Book ID
114155269
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
971 KB
Volume
57-58
Category
Article
ISSN
0167-9317

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