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Luminescent ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

✍ Scribed by Wang, Dong; Schönherr, Sven; Du, Song; Ronning, Carsten; Schaaf, Peter

Book ID
122709206
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
917 KB
Volume
98
Category
Article
ISSN
0167-577X

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## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and