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Plasma thinning of silicon-on-insulator bonded wafers

✍ Scribed by G.J. Gardopee; P.B. Mumola; P.J. Clapis; C.B. Zarowin; L.D. Bollinger; A.M. Ledger

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 345 KB
Volume: 22
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90184-7

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