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VLS growth of silicon whiskers on a patterned silicon-on-insulator (SOI) wafer

✍ Scribed by Yoshihiko Okajima; Masaru Amemiya; Kazuo Kato; Shin'ichiro Asai

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
596 KB
Volume
165
Category
Article
ISSN
0022-0248

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