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ChemInform Abstract: Growth of Buried Oxide Layers of Silicon-on-Insulator (SOI) Structures by Thermal Oxidation of the Top Silicon Layer.

✍ Scribed by E. SCHROER; S. HOPFE; Q. Y. TONG; U. GOESELE; W. SKORUPA

Publisher: John Wiley and Sons
Year: 2010
Weight: 29 KB
Volume: 28
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199743021

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✦ Synopsis

Abstract

ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable via the “References” option.

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