✦ LIBER ✦
Room temperature silicon wafer bonding with ultra-thin polymer films
✍ Scribed by Dr. Gertrud Kräuter; Andreas Schumacher; Ulrich Gösele; Thomas Jaworek; Prof. Gerhard Wegner
- Publisher
- John Wiley and Sons
- Year
- 1997
- Tongue
- English
- Weight
- 334 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0935-9648
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