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Fabrication of silicon nanopillar-based nanocapacitor arrays

✍ Scribed by Chang, Shih-wei; Oh, Jihun; Boles, Steven T.; Thompson, Carl V.


Book ID
121206840
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
631 KB
Volume
96
Category
Article
ISSN
0003-6951

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