Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

✍ Scribed by Yli-Koski, M. ;Haarahiltunen, A. ;Hintsala, J. ;Savin, H.

• Book ID: 112180986
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 273 KB
• Volume: 209
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201127718