Deposition of Thick Polysilicon Layers on Stress–reduced Silicon Wafers

✍ Scribed by G. Kissinger; W. Kissinger; M. Neubert

• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 211 KB
• Volume: 26
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170260428

✦ Synopsis

D e p o s i t i o n o f T h i c k P o l y s i l i c o n L a y e r s on Y t r e s s -r e d u c e d S i l i c o n Wafers I n t r o d u c t i o n The d e p o s i t i o n o f t h i c k p o l y s i l i c o n l a y e r s on o x i d i z e d s i l i c o n s