✦ LIBER ✦
Gettering phenomenon of oxidation-induced stacking-faults in silicon-on-insulator structure by wafer-direct-bonding method
✍ Scribed by Kyu-Tae Kim; Doo-Jin Choi
- Book ID
- 110240407
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 277 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0261-8028
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