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Thickness measurement on insulating silicon oxide layers on silicon structures with dielectric insulation

✍ Scribed by S. I. Stolyarov; V. M. Trokhin; N. M. Vinnikov; N. D. Vdovichenko; A. D. Usenko

Publisher: Springer US
Year: 1983
Tongue: English
Weight: 321 KB
Volume: 26
Category: Article
ISSN: 0543-1972
DOI: 10.1007/bf01101299

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