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Layer-transfer process for silicon-on-insulator with improved manufacturability

✍ Scribed by Alexander Usenko

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Proof of concept of an epitaxy-free laye

✍ V. Depauw; I. Gordon; G. Beaucarne; J. Poortmans; R. Mertens; J.-P. Celis 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 943 KB