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Generation and characterization of thick silicon-on-insulator films

✍ Scribed by Tillack, B. ;Banisch, R. ;Richter, H. H.

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 689 KB
Volume: 107
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211070129

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