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Frank Partial Dislocation in 4H-SiC Epitaxial Layer by MSE Method

✍ Scribed by Hamada, Shinkichi; Yoshioka, Hisashi; Kawami, Hiroshi; Nakamura, Nobuhiko; Setoguchi, Yoshitaka; Matsunami, Toru; Nishikawa, Kimito; Isshiki, Toshiyuki

Book ID: 125475938
Publisher: Trans Tech Publications, Ltd.
Year: 2012
Tongue: English
Weight: 378 KB
Volume: 725
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/msf.725.31

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