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Formation and stability of continuous buried SiO2 layers in SIMOX

✍ Scribed by G.F. Cerofolini; S. Bertoni; L. Meda; C. Spaggiari

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of buried insulating island-li

✍ A.V. Frantskevich; A.K. Fedotov; N.V. Frantskevich; A.V. Mazanik; E.I. Rau; V.S. 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 309 KB

Energy and dose dependence of silicon to

✍ U. Bussmamnn; A.K. Robinson; P.L.F. Hemment 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 428 KB

Formation of buried CoSi2 layers by ion

✍ M.F. Wu; A. Vantomme; H. Pattyn; G. Langouche; K. Maex; J. Vanhellemont 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 436 KB

Ion beam synthesis of thin buried layers

✍ PLF Hemment; KJ Reeson; JA Kilner; RJ Chater; C Marsh; GR Booker; GK Celler; J S 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 590 KB

Implanted oxide layers in silicon—establ

✍ RA Yankov; IH Wilson; IR Chararov 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 461 KB

Nuclear reaction analysis of hydrogen in

✍ J Krauser; A.G Revesz; H.L Hughes 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 131 KB