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Nuclear reaction analysis of hydrogen in the buried SiO2 layer of Si/SiO2/Si structures

✍ Scribed by J Krauser; A.G Revesz; H.L Hughes


Book ID
117145350
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
131 KB
Volume
296
Category
Article
ISSN
0022-3093

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