✦ LIBER ✦

Production and analysis of buried nitride layers in Si/SiO2 with ion beam methods

✍ Scribed by D. Fröse; D. Kollewe

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nonplanar and noncontinuous buried layer

✍ P.L.F. Hemment; K.J. Reeson; A.K. Robinson; J.A. Kilner; R.J. Chater; C.D. Marsh 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 405 KB

Experimental evidence of Si nanocluster

✍ Lars Röntzsch; Karl-Heinz Heinig; Bernd Schmidt 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 498 KB

Effect of ion energy and dose on the pos

✍ M. Carrada; C. Bonafos; G. Ben Assayag; D. Chassaing; P. Normand; D. Tsoukalas; 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 514 KB

Analysis of the structure and defects in

✍ Karen J. Reeson; Russell S. Spraggs; Russell M. Gwilliam; Brian J. Sealy 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Temperature dependence of profile tailin

✍ F. Schulte; M. Maier 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 314 KB

Quantitative distribution analysis of B,

✍ G. Stingeder 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 817 KB