Experimental evidence of Si nanocluster δ-layer formation in buried and thin SiO2 films induced by ion irradiation

✍ Scribed by Lars Röntzsch; Karl-Heinz Heinig; Bernd Schmidt

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 498 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.09.098