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Experimental evidence of Si nanocluster δ-layer formation in the vicinity of ion-irradiated SiO2–Si interfaces

✍ Scribed by Lars Röntzsch; Karl-Heinz Heinig; Bernd Schmidt; Arndt Mücklich

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 183 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.012

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