Quantitative distribution analysis of B, As and Sb in the layer system SiO2/Si with SIMS: elimination of matrix and charging effects

✍ Scribed by G. Stingeder

• Book ID: 111933004
• Publisher: Springer
• Year: 1987
• Tongue: English
• Weight: 817 KB
• Volume: 327
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00469821